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Semitool equinox electroplating/electro-plater system
Semitool Equinox Electroplating System, Model Number: EQ232PMCuELESS
Comes with a manual (on cd) and what you see in the pictures. If you don't see it, you probably wont get it.
Power Requirements: 208 VAC, 3-Phase (5-Wire), 50/60 Hz
Largest Motor or Load: 10 Amps
Short Circuit Interrupt: 100,000 Amps
Date of Manufacture: May 22, 2002
Electric Diagram Number: 20792
Revision: 3.1 (Indicated in manual, not on tag)
The modular processing system offers a diverse capability with process chambers for spray, vapor, immersion, and electroplating applications, integrated into a single cluster tool. The Equinox is available as manual or fully-automated and can be configured with one to six chambers.
* Supports round or square substrates 75mm to 200mm
* Processes traditional and non-mainstream materials (e.g., glass, silicon, gallium arsenide, ceramic, lithium niobate, and indium phosphide)
* Device-side-down processing creates a thin, uniform boundary layer
* Controlled chemical distribution and wafer rotation
* Precise, repeatable and reliable process and system control
* Gold electroplating and deplating
* Copper damascene electroplating
* Patterned copper electroplating
* Picture 6 - Front Controls & Indicators
* Picture 7 - Right Chamber Section
* Picture 8 - Left Chamber Section
* Picture 9 - Bottom-Front Panel Removed
* Picture 10 - Right Side View of Chambers
* Picture 11 - Right Side, Bottom Panel Removed #1
* Picture 12 - Right Side, Bottom Panel Removed #2
* Picture 13 - Right Side, Top Panel Removed
* Picture 14 - Left Side View of Chambers
* Picture 15 - Left Side, Bottom Panel Removed #1
* Picture 16 - Left Side, Bottom Panel Removed #2
* Picture 17 - Left Side, Top Panel Removed
* Picture 18 - Left Chamber Section
* Picture 19 - Photohelics on Back Side
* Picture 20 - Interfaces on Back Side
* Picture 21 - Facility Pressure Regulators
* Picture 22 - Facility Connections on Back Side
* Picture 23 - Serial Number Tag
