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Tencor spectramap auto SM300 film thickness mapping
Tencor SpectraMap Auto SM300 Film Thickness Mapping
This Tencor film thickness mapping tool is used surplus. It was tested in our facility and is not working. The system did not initialize, and the Drivers-Sensors panel did not power on. Also, the operating program and/or OS are corrupted and did not function properly. The system includes software and drivers.
