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> Kurt j. lesker supermini dc sputtering/vacuum system 8"
Kurt j. lesker supermini dc sputtering/vacuum system 8"
Kurt J. Lesker SuperMini Vacuum Sputtering System - Thin Film - Single Source
Specifications are from Kurt J. Lesker and may vary slightly due to upgrades, options, or revisions this unit may or may not have.
The system was removed from serving in working condition however we do not have the expertise to fully test it. It looks like it is a planetary DC sputtering system. The wafer holder is attached to a motor so that it spins (probably to make sure the wafer gets deposited on to evenly). The Pyrex chamber is cracked and will need to be replaced.
List Price for the Base System was: $55,000.00 from Kurt J. Lesker (1993)
List Price for the Electric Hoist Option was: $4900.00 from Kurt J. Lesker (1993)
List Price for the QXM500 Crystal Monitor Option was: $3470.00 from Kurt J. Lesker (1993)
Total List Price was: $63,370.00 from Kurt J. Lesker (1993)
List of Key Components in the System:
* Leybold NT 150/360 Turbotronik Turbo Pump Controller, 2124.06 Run-time Hours, Part Number: 85472-1, Serial Number: P2E 4754
* Leybold Turbovac 361 Turbo Pump, Part Number: 85671, Serial Number: A920100019
* Alcatel 2021A Mechanical Pump, Serial Number: 237865
* AE MDX Magnetron Drive, Model Number: 2011-000-AA, Serial Number: 27149 (Standard Z, 5kW Unit)
* Varian 815 Vacuum Gauge, Part Number: L5700-301, Torr Scale, Serial Number: LCNAB0021014
* Granville 307 vacuum Gauge Controller, Catalog Number: 307005, Serial Number: 7594, Model Number: 01, Date Code: J2
* Analog Output and Electrometer Modules installed
* Kurt J. Lesker QXM500 Crystal Monitor
* Kurt J. Lesker QXO-500 Oscillator
* Granville Philips Convector Gauge
* Kurt J. Lesker Ionization Gauge
* MKS 271 Baratron Pressure Gauge, Model Number: 127A-11249, Range: 1 Torr, Serial Number: 92211214A
* Nitrogen Flow Meter, N2 SCFH Control, 5-50 Range Air
* Argon Flow Meter, CC/min, Air x 100, 1-10 Range
* Planetary Motor control with 90 to 1700 RPM motor
The SuperMini is an affordable system that does not compromise on performance. It is an economical research system for single source thin film deposition by magnetron sputtering, laser ablation, evaporation or ion beam sputtering onto substrates. The SuperMini is a flexible approach to system design, with a wide variety of standard options and accessories available. With the SuperMini, we have drawn on all available technology and our years of expertise to create a basic deposition system with very advanced capabilities.
Base Pressure: 5 x 10-7 torr or lower*
Typical Pumpdown Time: 45 minutes (after venting to dry N2)
Frame: 1 1/2 bay with top (stainless), swivel casters, leveling feet
* 1500 l/sec cryogenic pump (replaced by a Leybold Turbovac 361 Turbo Pump)
* 11 cfm direct-drive mechanical pump
Chamber: 18" x 18" H Pyrex bell jar with implosion guard (I measured 17" I.D.)
Baseplate: 22" OD x 1" thick, 304 stainless steel
Valves: Manual stainless steel gate, foreline and roughing valves
Gas Flow: 2 channels (manual)
Gauges: Granville Philips 270 - 1 ionization, 2 thermocouple
System Dimensions**: 33 1/2" W x 34" D x 72" H (91 1/2" with bell jar raised)
Power: 208 V, 60 Hz, 3 Phase, 25 Amps
Notes: *: Depends on process and overall cleanliness of chamber. Lower base pressures possible.
**: Allow 3" around system for access
For More Pictures Please Click the Following:
* Picture 5 - Front Panel, Right Side, Close-up
* Picture 6 - Front Panel, Left Side, Close-up
* Picture 7 - Back Side, Close-up
* Picture 8 - Right Side, Close-up
* Picture 9 - Left Side, Close-up
* Picture 10 - Chamber Lid & Wafer Holder #1
* Picture 11 - Chamber Lid & Wafer Holder #2
* Picture 12 - Bottom of Chamber, Sputtering Target & Shield
* Picture 13 - Sputtering Target, Close-up
* Picture 14 - Crystal Monitor Sensor, Close-up
* Picture 15 - Crack in Pyrex Chamber
