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> Varian 941-6501 vacsorb sorption pump with heater
Varian 941-6501 vacsorb sorption pump with heater
Varian 941-6501 VACSORB Sorption Pump with a Wrap-around Heater
Specifications and description are from Varian and may vary slighty due to upgrades, options, items or revisions this unit may or may not have.
Serial Number:Quantities Available
Heater Model Number:B46SL601WX
* All aluminum body and fins
The VacSorb Roughing Pump quickly evacuates a vacuum chamber from atmosphere down to a pressure of several millitorr (microns of Hg). Since it uses no oil or electrical power and has no moving parts, the VacSorb Pump is ultraclean and vibration free. When roughing is followed by spuuter-on high vacuum pumping, the cleanest possible conditions are obtained. The standard pump has a capacity of 60,000 Torr-liters between bakeout regeneration intervals.
When the gas-capturing molecular sieve material is saturated, the wrap-around heater quickly heats the pump to room temperature to begin removal of the trapped gases through an automatic one-way relief valve. Opearting life of the sieve material is indefinite under normal circumstances.
The pump is supported only by its inlet tube and connection 2.75" O.D. ConFlat Flange. These flanges are recognized for their vacuum-sealing integrity. No other support brackets are required.
This pump also provides high speed argon pumping. In typical thin film sputtering work, one VacSorb Pump provides a clean, fast pumping against a continuous flow of argon at a pressure of 1x10-2 Torr for 50 to 100 hours.
Absolute Maximum Pumping Capacity: 76,000 Torr - liters
Liquid Nitrogen Consumption: 4.3 liters (Approximate amount in liters per pump-down at atmospheric pressure)
Sorbent Material: Type 5A Molecular Sieve
Sieve Requirements: 3 lb (2 cans)
Bakeout Temperature: 250 C
Body and Integral Cooling Fins: Aluminum
Pump Neck and Connecting Flange: Type 304 Stainless Steel
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