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Edwards boc L70 dry semiconductor vacuum pump
The BOC Edwards L70 Semiconductor Dry Vacuum Pump System Rebuilt
The L70 is a simple low cost dry pump specifically designed for clean loadlocks and similar applications.
Semiconductor Fab Applications Include:
Every Edwards L70 L 70 subfab dry vacuum pump we sell goes through a rigorous rebuild process at our Albuquerque, New Mexico (NM) location. As each pump is rebuilt they are fully dismantled and all parts are decontaminated and inspected. Damaged or worn parts are replaced. All bearings, o-rings, seals, and gaskets are replaced. Rebuilt pumps are attached to our computer controlled pressure diagnostics system where their performance is monitored for 72-hours under varying load. Pumps are leak tested to ensure safety during operation. All sensors are tested and the final rebuilt Edwards L70 subfab vacuum dry pump is cleaned and painted as required. We offer rebuild subfab services to rebuild you Edwards L70 dry vacuum pumps. Please call our office at (***) 872-0037 for more information about our subfab rebuild service. For detailed specs and instruction manual on this Edwards L70 subfab pump see AVAILABLE DOWNLOADS below.
Edwards DryPump L70 Spec Sheet.pdf
Product: The BOC Edwards L70 Semiconductor Dry Vacuum Pump System Rebuilt
