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KXPS5 series tri-axis 3G, digital analog accelerometer
These high-performance silicon micromachined linear accelerometers and inclinometers consist of a sensor element and an ASIC packaged in a 3x5x0.9mm Land Grid Array (LGA). The sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE) processes and is protected from the environment by a hermetically-sealed silicon cap at the wafer level. The KXPS5 series is designed to provide a high signal-to-noise ratio with excellent performance over temperature. These sensors can accept supply voltages between 1.8V and 5.25V. Sensitivity is factory programmable allowing customization for applications requiring from 1.5g to 6.0g ranges. Sensor bandwidth is user-definable. Interrupts can be generated for acceleration on any axis above a threshold value (Motion Interrupt) or for acceleration on all three axes below a threshold value (Free-fall Interrupt). The sensor element functions on the principle of differential capacitance. Acceleration causes displacement of a silicon structure resulting in a change in capacitance. An ASIC, using a standard CMOS manufacturing process, detects and transforms changes in capacitance into an analog output voltage, which is proportional to acceleration. This voltage is digitized by an on-board A/D converter and is accessed via an inter-integrated circuit (I2C) bus or serial peripheral interface (SPI).
KXPS5 SERIES Tri-axis PDF File
