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> Ae advanced energy rfx 2500 rf generator 3155011-000
Ae advanced energy rfx 2500 rf generator 3155011-000
Here is a used Advanced Energy RFX2500 RF Generator. Also included is the RFX 1.25k and RFX 2.5k User Manual with Full Schematics.
This generator is rated from 0 to 2500 Watts RF output. It is tested and works great from the front panel from 300 to 2500W.
Output: 0-2.5kW @13.56MHz via HN coax bulkhead, 3:1 VSWR loads with up to 625W reflected power
Cooling: 20 gph(.33 gpm)Min @ 27C max, via 1/4" Swagelok connectors
-Pulsing from 0-5kHz via external input, pulse power regulation
-Remote, Auto, Manual control via front panel key switch
-4 Target timers, and target life counters for sputtering applications.
This unit powers up and passes the Self-Test. Unit runs great from 300W to the full rated 2500W and is within the +/-2% spec throughout, see the last picture of the unit running at 2500 watts into a ~50ohm load.
This unit will run from 0 through 300W as well, but there seems to be an issue with the front panel control locking up and no buttons or the control knob work. If the RF is started with a ~ 1 to 300W setpoint the front panel might lock up. But if the unit is started above 300W and then adjusted down, then it operates properly to a point and then might lock up again. Unit should be considered as a 300 to 2500W unit only because of this issue.
Guaranteed Fully Operational from 300W to 2500W
