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Diamonex linear cd ion beam source processing system
Diamonex Linear CD Ion Beam Source Processing System
Diamonex 3.5 Linear Closed-Drift High-Voltage Gridless Ion Beam Source Processing System
Unit Dimensions (L" x W" x H"): 8 7/8 * 7 3/4 * 9 3/8
The origin of DIAMONEX's proprietary ion beam equipment dates back to collaborative efforts between DIAMONEX and several notable Russian institutes and laboratories. The objective was to develop an understanding of high-current gridless ion beam sources used in space propulsion, and to develop a new technology that was well-suited for rigorous manufacturing environments. DIAMONEX developed the CD SOURCE technology in response to its internal manufacturing needs for high rate deposition of electrically insulating diamond-like films. Since 1995, the CD SOURCE technology has been used internally in a range of R&D and manufacturing processes at DIAMONEX.
Now, the CD SOURCE technology is expanding its utility into a range of applications including substrate cleaning, etching, direct deposition, and Ion Beam Assisted Deposition (IBAD).
DIAMONEX Ion Beam Systems are a portfolio of ion beam process equipment systems built around the DIAMONEX CD SOURCE technology (U.S. Patents 5,973,447 & 6,086,962 and foreign patents pending). The CD SOURCE is a robust, production-proven high current ion beam source designed for use in heavy deposition and sophisticated thin film production environments.
The DIAMONEX 3.5" Closed-drift (CD) Ion Source (model 200S IMOl-8) is designed specifically for high rate, reliable deposition of DLC coatings for the data storage industry. The source comprises an anode assembly, integrated hollow cathode electron source (HCES) and electromagnet assembly in a compact, flange-mounted housing.
40-100 VDC (measured from anode to ground)
DIAMONEX 220P8S01 power supply (see related specifications)
Hollow cathode: 20 sccm to run, 70 sccm to ignite, Anode: 20-40 sccm to run (Film quality is dependent on gas purity-suggest 99.99% purity)
Gas - 1/4" MNPT, Power - custom connections to DIAMONEX power supply, Thermocouple - Type K (no readout supplied)
Model 220S2MOl-4 Hydrocarbon ring (see specifications below)
at or below 5 x 10-8 t-l/sec helium leak rate
